INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SYSTEMS AND METHODS FOR ACHIEVING ION ENERGY DISTRIBUTION"

GENEVA, June 25 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, CA 94538) filed a patent application (PCT/US2024/058741) for "SYSTEMS AND METHODS FOR ACHIEVING ION ENERGY DISTRIBUTION" on Dec 05, 2024. With publication no. WO/2025/128408, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SINGH, Amit, Kumar (4650 Cushing ParkwayFremont, CA 94538)

Abstract: Systems and methods for achieving an energy distribution are described. One of the methods includes accessing a value of the ion energy distribution and ident...