INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SIOCH-SELECTIVE ETCHING IN SUBSTRATE PROCESSING"

GENEVA, April 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/049599) for "SIOCH-SELECTIVE ETCHING IN SUBSTRATE PROCESSING" on Oct 06, 2025. With publication no. WO/2026/080357, the details related to the patent application was published on Apr 16, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YANG, Wenbing (4650 Cushing ParkwayFremont, California 94538), RAMNANI, Pankaj Ghanshyam (4650 Cushing ParkwayFremont, California 94538), CHAWLA, Aseem (4650 Cushing ParkwayFremont, California 94538), BALAN, Arunima Deya (4650 Cush...