INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "SHOWERHEAD FOR SUPPLYING METASTABLE ACTIVATED RADICALS"

GENEVA, Nov. 25 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/027870) for "SHOWERHEAD FOR SUPPLYING METASTABLE ACTIVATED RADICALS" on May 06, 2025. With publication no. WO/2025/240157, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RENTA, Mike (4650 Cushing ParkwayFremont, California 94538)

Abstract: A gas distribution device includes a gas diffusing surface arranged between upper and lower regions of a plasma processing system, a plasma-exposed side a...