INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "POSITIONING SYSTEM TO ENABLE A SOFT LANDING FOR REPLACEABLE EDGE RINGS IN A PLASMA PROCESSING SYSTEM"

GENEVA, March 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/045658) for "POSITIONING SYSTEM TO ENABLE A SOFT LANDING FOR REPLACEABLE EDGE RINGS IN A PLASMA PROCESSING SYSTEM" on Sep 10, 2025. With publication no. WO/2026/064177, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KRISHNAPPA, Sathisha (4650 Cushing ParkwayFremont, California 94538), HERNANDEZ, Joseph Ryan (4650 Cushing ParkwayFremont, California 94538), CHHATRE, Ambarish (4650 Cushing Park...