INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "MULTIZONE SHOWERHEAD FOR SEMICONDUCTOR PROCESSING"

GENEVA, Dec. 17 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/032593) for "MULTIZONE SHOWERHEAD FOR SEMICONDUCTOR PROCESSING" on Jun 06, 2025. With publication no. WO/2025/255431, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GUO, Tongtong (4650 Cushing Pkwy.Fremont, California 94538), KULKARNI, Prasanna (4650 Cushing Pkwy.Fremont, California 94538), BATZER, Rachel E. (4650 Cushing Pkwy.Fremont, California 94538), TEWARI, Kamal (4650 Cushing Pkwy.Fremont...