INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "IMPROVED PUMP EFFICIENCY FOR SUBSTRATE PROCESSING SYSTEMS"

GENEVA, March 31 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/046704) for "IMPROVED PUMP EFFICIENCY FOR SUBSTRATE PROCESSING SYSTEMS" on Sep 17, 2025. With publication no. WO/2026/064354, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LEESER, Karl Frederick (4650 Cushing ParkwayFremont, California 94538)

Abstract: A substrate processing system includes a reactor configured to perform at least one substrate processing operation, at least one exhaust pi...