GENEVA, May 12 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/053038) for "FORELINE FOR SEMICONDUCTOR PROCESSING" on Oct 29, 2025. With publication no. WO/2026/096580, the details related to the patent application was published on May 07, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SHARMA, Pawan (4650 Cushing Pkwy.Fremont, California 94538), WONGSENAKHUM, Panya (4650 Cushing Pkwy.Fremont, California 94538), LAFFERTY, William (4650 Cushing Pkwy.Fremont, California 94538)
Abstract: A semiconductor processing system is provi...