INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "EDGE RING COMPENSATION MONITORING AND ADJUSTMENT DURING PLASMA PROCESSING"

GENEVA, Oct. 20 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/023370) for "EDGE RING COMPENSATION MONITORING AND ADJUSTMENT DURING PLASMA PROCESSING" on Apr 07, 2025. With publication no. WO/2025/217009, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): OLIVETI, Anthony Michael (4650 Cushing ParkwayFremont, California 94538), CALEBOTTA, Gabriel Anthony (4650 Cushing ParkwayFremont, California 94538), HOLLAND, John (4650 Cushing ParkwayFremont, California 9...