INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CRYOGENIC ETCH USING ACID FORMING GAS"

GENEVA, Dec. 2 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/029971) for "CRYOGENIC ETCH USING ACID FORMING GAS" on May 19, 2025. With publication no. WO/2025/244987, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LILL, Thorsten (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), WANG, Mingmei (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), OH, Youn-Jin (c/o Lam Research Corporati...