GENEVA, Dec. 2 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/030326) for "COOLING SLEEVE FOR PROCESSING TOOL VALVE" on May 21, 2025. With publication no. WO/2025/245194, the details related to the patent application was published on Nov 27, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): NASR, Saghar (4650 Cushing ParkwayFremont, California 94538), ALTECOR, Aleksey V (4650 Cushing ParkwayFremont, California 94538)
Abstract: One example provides a processing tool comprising a point-of-use valve manifold (PVM) configured to ...