INTERNATIONAL PATENT: LAM RESEARCH CORPORATION FILES APPLICATION FOR "CONFORMAL ETCH OF SEMICONDUCTOR MATERIALS"

GENEVA, March 4 -- LAM RESEARCH CORPORATION (4650 Cushing Pkwy.Fremont, California 94538) filed a patent application (PCT/US2025/043017) for "CONFORMAL ETCH OF SEMICONDUCTOR MATERIALS" on Aug 21, 2025. With publication no. WO/2026/044137, the details related to the patent application was published on Feb 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MUSSELWHITE, Nathan (4650 Cushing Pkwy.Fremont, California 94538), SHARIATI, Yusef Abdurraheem (4650 Cushing Pkwy.Fremont, California 94538), ZHU, Ji (4650 Cushing Pkwy.Fremont, California 94538), KAWAGUCHI, Mark Naoshi (4650 Cushing Pkwy.F...