GENEVA, April 8 -- LAM RESEARCH CORPORATION (4650 Cushing ParkwayFremont, California 94538) filed a patent application (PCT/US2025/046356) for "A SELECTIVE ETCH STOP LAYER FOR CAPACITOR ETCH" on Sep 15, 2025. With publication no. WO/2026/072362, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): PISKUN, Ilya (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), LEE, Sangchul (c/o Lam Research Corporation4650 Cushing Parkway, M/S CA-1Fremont, California 94538), CHI, Kyeong-Koo (c/o Lam Researc...