GENEVA, March 23 -- LAM RESEARCH AG (SEZ-Strasse 19500 Villach) filed a patent application (PCT/EP2025/073082) for "APPARATUS FOR PROCESSING WAFER-SHAPED ARTICLES" on Aug 12, 2025. With publication no. WO/2026/057273, the details related to the patent application was published on Mar 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BRIEN, Daniel (c/o Lam Research AGSEZ-Strasse 19500 Villach), FUCHS, Roman (c/o Lam Research AGSEZ-Strasse 19500 Villach), GANCS, Lajos (c/o Lam Research AGSEZ-Strasse 19500 Villach), KLEMM, Michael (c/o Lam Research AGSEZ-Strasse 19500 Villach)
Abstract: Appa...