INTERNATIONAL PATENT: KOVIS TECHNOLOGY CO., LTD., 주식회사 코비스테크놀로지 FILES APPLICATION FOR "SPIRAL SCANNING APPARATUS INCLUDING MULTIPLE MEASUREMENT SENSORS AND WAFER INSPECTION METHOD USING SAME"

GENEVA, March 18 -- KOVIS TECHNOLOGY CO., LTD. (3floor, 169-23, Gasan digital 2-roGeumcheon-guSeoul 08504), 주식회사 코비스테크놀로지 (서울특별시금천구가산디지털2로 169-23, 3층) filed a patent application (PCT/KR2025/013449) for "SPIRAL SCANNING APPARATUS INCLUDING MULTIPLE MEASUREMENT SENSORS AND WAFER INSPECTION METHOD USING SAME" on Sep 02, 2025. With publication no. WO/2026/054464, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is manage...