GENEVA, April 28 -- KOREA ADVANCED NANO FAB CENTER ((lui-dong) 109, Gwanggyo-ro, Yeongtong-guSuwon-siGyeonggi-do 16229), (재)한국나노기술원 (경기도수원시영통구 광교로 109 (이의동)) filed a patent application (PCT/KR2025/012656) for "CHEMICAL MECHANICAL PLANARIZATION METHOD IN SEMICONDUCTOR MANUFACTURING PROCESS AND APPARATUS THEREOF" on Aug 20, 2025. With publication no. WO/2026/084228, the details related to the patent application was published on Apr 23, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellec...