GENEVA, April 29 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/045847) for "SYSTEM AND METHOD FOR UPSTREAM PURGING IN INSPECTION SYSTEMS" on Sep 11, 2025. With publication no. WO/2026/084804, the details related to the patent application was published on Apr 23, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HAO, Yihua (3477 Lily WayApt. 210San Jose, California 95134), ZHAO, Guoheng (408 Pratt LanePalo Alto, California 94306), WANG, Chunhai (5026 Blackbird WayPleasanton, California 94566)
Abstract: An inspection system may includ...