INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "SYSTEM AND METHOD FOR MEASURING CRITICAL DIMENSIONS USING TILT-BASED REFLECTOMETRY"

GENEVA, April 29 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/049955) for "SYSTEM AND METHOD FOR MEASURING CRITICAL DIMENSIONS USING TILT-BASED REFLECTOMETRY" on Oct 08, 2025. With publication no. WO/2026/084921, the details related to the patent application was published on Apr 23, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NATH, Janardan (1929 Trento LoopMilpitas, California 95035), ATKINS, Phillip R. (1588 Carmel DriveSan Jose, California 95125), SHI, Jinchuan (536 Loch Lomond Ct.Milpitas, California 95035), KRISHNAN, Shan...