INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "PHYSICS AUGMENTED REGRESSION ALGORITHM FOR CRITICAL DIMENSIONS IN LARGE PITCH TARGETS"

GENEVA, Dec. 2 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/033715) for "PHYSICS AUGMENTED REGRESSION ALGORITHM FOR CRITICAL DIMENSIONS IN LARGE PITCH TARGETS" on Jun 16, 2025. With publication no. WO/2025/245546, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ATKINS, Phillip R. (1588 Carmel DriveSan Jose, California 95125), SHI, Jinchuan (536 Loch Lomond Ct.Milpitas, California 95035)

Abstract: Methods and systems for determining information for a specimen a...