INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "CREATION OF ELECTRON BEAMS USING A MICRO-DEFLECTOR ARRAY"

GENEVA, Feb. 24 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/040802) for "CREATION OF ELECTRON BEAMS USING A MICRO-DEFLECTOR ARRAY" on Aug 06, 2025. With publication no. WO/2026/039242, the details related to the patent application was published on Feb 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): JIANG, Xinrong (2651 South CourtPalo Alto, California 94306), BRODIE, Alan D. (998 Van Auken CirclePalo Alto, California 94303)

Abstract: A gun lens receives an electron beam or other particle beam, which is then divided into beam...