GENEVA, April 8 -- KLA CORPORATION (One Technology DriveMilpitas, CA 95035) filed a patent application (PCT/US2025/045850) for "COVER OPTIMIZATION FOR SUBSTRATE-BASED PROCESS CONDITION MEASUREMENT DEVICE" on Sep 11, 2025. With publication no. WO/2026/072324, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): QULI, Farhat, A. (6065 Monte Verde CourtCastro Valley, CA 94552), ZHOU, Jing (425289 Mistry Spring DriveCastro Valley, CA 94552), MAHZOON, Razieh (27783 La Porte Ave.Hayward, CA 94545)
Abstract: A process condition meas...