INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "CARBON COATED SILICON CARBIDE VACUUM WAFER CHUCK TO CONTROL ELECTROSTATIC DISCHARGE TO WAFER"

GENEVA, Dec. 2 -- KLA CORPORATION (One Technology DriveMilpitas, CA 95035) filed a patent application (PCT/US2025/029452) for "CARBON COATED SILICON CARBIDE VACUUM WAFER CHUCK TO CONTROL ELECTROSTATIC DISCHARGE TO WAFER" on May 15, 2025. With publication no. WO/2025/244909, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FLORES, Ryan (620 Park View Dr, Apt. 103Santa Clara, CA 95054)

Abstract: A vacuum chuck may include a chuck body formed from silicon carbide. A carbon coating, such as a diamond-like carbon coating, may ...