INTERNATIONAL PATENT: KLA CORPORATION FILES APPLICATION FOR "AUTOMATED MODEL TERM SELECTION FOR MONITORING AND OPTIMIZED PROCESS CONTROL"

GENEVA, March 18 -- KLA CORPORATION (One Technology DriveMilpitas, California 95035) filed a patent application (PCT/US2025/043822) for "AUTOMATED MODEL TERM SELECTION FOR MONITORING AND OPTIMIZED PROCESS CONTROL" on Aug 28, 2025. With publication no. WO/2026/055037, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): EHRLICH, Christoph (Baumstr. 1101099 Dresden), GROEGER, Philip (Schubertstrasse 3301307 Dresden)

Abstract: Automated model term selection may use lasso regression for selecting model terms and a cross-validatio...