GENEVA, Aug. 21 -- PICOSUN OY filed a patent application (FI2025/050507) for “INTEGRATED SUBSTRATE PROCESSING APPARATUS AND METHOD”. With publication no. WO/2026/172039, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 16/02
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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