GENEVA, Oct. 5 -- TOKYO ELECTRON LIMITED filed a patent application (JP2026/010713) for “GAS RECOVERY SYSTEM OF PROCESSING DEVICE AND GAS RECOVERY METHOD OF PROCESSING DEVICE”. With publication no. WO/2026/204664, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 16/44
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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