GENEVA, June 24 -- CANON TOKKI CORPORATION filed a patent application (JP2025/037913) for “FILM DEPOSITION APPARATUS, CONTROL METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND MASK”. With publication no. WO/2026/115990, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: C23C 14/04
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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