GENEVA, July 1 -- CARL ZEISS SMT GMBH filed a patent application (EP2025/084854) for “EUV POLARIZATION DEVICE COMPRISING AN EUV POLARIZER”. With publication no. WO/2026/125038, here are the other details related to the patent application:
Kind: Initial Publication with ISR [A1]
IPC: G02B 5/30
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
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