INTERNATIONAL PATENT: ETA-SEMITECH (ZHEJIANG) CO., LTD., 瑶光半导体（浙江）有限公司 FILES APPLICATION FOR "REACTION CHAMBER FOR EPITAXIAL PROCESS AND MULTI-WAFER PLANETARY EPITAXIAL APPARATUS"

Posted On: 2026-03-29

GENEVA, March 29 -- ETA-SEMITECH (ZHEJIANG) CO., LTD. (1st Floor West, Building 2, No.926 Changhong East Street, Kangqian Sub-district, Deqing CountyHuzhou, Zhejiang 313200), 瑶光半导体（浙江）有限公司 (中国浙江省湖州市德清县康乾街道长虹东街926号2号楼西1楼) filed a patent application (PCT/CN2025/122684) for "REACTION CHAMBER FOR EPITAXIAL PROCESS, AND MULTI-WAFER PLANETARY EPITAXIAL APPARATUS" on Sep 19, 2025. With publication no. WO/2026/061504, the details related to the patent application was published on Mar 26, 2026....

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INTERNATIONAL PATENT: ETA-SEMITECH (ZHEJIANG) CO., LTD., 瑶光半导体（浙江）有限公司 FILES APPLICATION FOR "REACTION CHAMBER FOR EPITAXIAL PROCESS AND MULTI-WAFER PLANETARY EPITAXIAL APPARATUS"