GENEVA, Feb. 18 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/040986) for "WAFER CARRIER WITH AUTOMATION POSITIONING SYSTEM" on Aug 06, 2025. With publication no. WO/2026/035894, the details related to the patent application was published on Feb 12, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): ABD MUTHOLIB, Mohamad Zakaria (129 Concord RoadBillerica, Massachusetts 01821), LIM, Sin Ghun (129 Concord RoadBillerica, Massachusetts 01821), TAN, Hang Khim (129 Concord RoadBillerica, Massachusetts 01821)
Abstract: A substrate carrier i...