INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF SILICON NITRIDE AND SILICON CARBIDE"

GENEVA, Dec. 17 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/031646) for "SILICA-BASED SLURRY FOR SELECTIVE POLISHING OF SILICON NITRIDE AND SILICON CARBIDE" on May 30, 2025. With publication no. WO/2025/254960, the details related to the patent application was published on Dec 11, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MONTOTO-BLANCO, Elena C. (129 Concord Rd.Billerica, Massachusetts 01821), REISS, Brian (129 Concord Rd.Billerica, Massachusetts 01821), VILLANI-GALE, Alex (129 Concord Rd.Billerica, Massachusetts 01821), SA...