INTERNATIONAL PATENT: ENTEGRIS, INC. FILES APPLICATION FOR "ELECTROSTATIC CHUCK WITH REDUCED CHARGE INJECTION INTO DIELECTRIC LAYER"

GENEVA, Sept. 10 -- ENTEGRIS, INC. (129 Concord Rd.Billerica, Massachusetts 01821) filed a patent application (PCT/US2025/015844) for "ELECTROSTATIC CHUCK WITH REDUCED CHARGE INJECTION INTO DIELECTRIC LAYER" on Feb 13, 2025. With publication no. WO/2025/183914, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): RYBCZYNSKI, Jakub (129 Concord Rd.Billerica, Massachusetts 01821), DONNELL, Steven (129 Concord Rd.Billerica, Massachusetts 01821)

Abstract: An electrostatic chuck device having reduced charge injection may include...