GENEVA, April 8 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/046211) for "CMP COMPOSITION INCLUDING CERIA POLYMER COMPOSITE PARTICLES" on Sep 12, 2025. With publication no. WO/2026/072350, the details related to the patent application was published on Apr 02, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GRUMBINE, Steven (129 Concord Rd.Billerica, Massachusetts 01821), WARD, William J. (129 Concord Rd.Billerica, Massachusetts 01821), ZHAO, Qiang (129 Concord Rd.Billerica, Massachusetts 01821)
Abstract: A chemical mechanical poli...