GENEVA, April 8 -- ENTEGRIS, INC. (129 Concord RoadBillerica, Massachusetts 01821) filed a patent application (PCT/US2025/046707) for "CMP COMPOSITION INCLUDING ALCOHOL AMINE MOLYBDENUM ETCH INHIBITOR" on Sep 17, 2025. With publication no. WO/2026/072400, the details related to the patent application was published on Apr 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HSU, Wei-Hsin (129 Concord Rd.Billerica, Massachusetts 01821), KO, Cheng-Yuan (129 Concord Rd.Billerica, Massachusetts 01821)

Abstract: A chemical mechanical polishing composition comprises, consists of, or consists essent...