INTERNATIONAL PATENT: EBARA CORPORATION, 株式会社荏原製作所 FILES APPLICATION FOR "SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE AND SUPPORT STRUCTURE OF CLEANING TOOL"

GENEVA, March 17 -- EBARA CORPORATION (11-1, Haneda Asahi-cho, Ota-ku, Tokyo1448510), 株式会社荏原製作所 (東京都大田区羽田旭町１１番１号) filed a patent application (PCT/JP2025/029591) for "SUBSTRATE CLEANING DEVICE, SUBSTRATE PROCESSING DEVICE, AND SUPPORT STRUCTURE OF CLEANING TOOL" on Aug 22, 2025. With publication no. WO/2026/053763, the details related to the patent application was published on Mar 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor...