INTERNATIONAL PATENT: EBARA CORPORATION, 株式会社荏原製作所 FILES APPLICATION FOR "METHOD AND PROGRAM FOR EVALUATING STATE OF SEMICONDUCTOR MANUFACTURING DEVICE"

GENEVA, March 24 -- EBARA CORPORATION (11-1, Haneda Asahi-cho, Ota-ku, Tokyo1448510), 株式会社荏原製作所 (東京都大田区羽田旭町１１番１号) filed a patent application (PCT/JP2025/031937) for "METHOD AND PROGRAM FOR EVALUATING STATE OF SEMICONDUCTOR MANUFACTURING DEVICE" on Sep 10, 2025. With publication no. WO/2026/058883, the details related to the patent application was published on Mar 19, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KAWDE, Rohit...