INTERNATIONAL PATENT: EBARA CORPORATION, 株式会社荏原製作所, NATIONAL UNIVERSITY CORPORATION NAGAOKA UNIVERSITY OF TECHNOLOGY, 国立大学法人長岡技術科学大学 FILES APPLICATION FOR "POLISHING DEVICE AND METHOD FOR EVALUATING WORK-AFFECTED LAYER IN POLISHING DEVICE"

Posted On: 2026-05-11

GENEVA, May 11 -- EBARA CORPORATION (11-1, Haneda Asahi-cho, Ota-ku, Tokyo1448510), 株式会社荏原製作所 (東京都大田区羽田旭町１１番１号), NATIONAL UNIVERSITY CORPORATION NAGAOKA UNIVERSITY OF TECHNOLOGY (1603-1, Kamitomioka-cho, Nagaoka-shi, Niigata9402188), 国立大学法人長岡技術科学大学 (新潟県長岡市上富岡町１６０３－１) filed a patent application (PCT/JP2025/038396) for "POLISHING DEVICE AND METHOD FOR EVALUATING WORK-AFFE...

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INTERNATIONAL PATENT: EBARA CORPORATION, 株式会社荏原製作所, NATIONAL UNIVERSITY CORPORATION NAGAOKA UNIVERSITY OF TECHNOLOGY, 国立大学法人長岡技術科学大学 FILES APPLICATION FOR "POLISHING DEVICE AND METHOD FOR EVALUATING WORK-AFFECTED LAYER IN POLISHING DEVICE"