INTERNATIONAL PATENT: CYMER, LLC FILES APPLICATION FOR "DISCHARGE CHAMBER ACCOMMODATING MULTIPLE DISCHARGES"

GENEVA, Feb. 17 -- CYMER, LLC (17075 Thornmint CourtSan Diego, California 92127) filed a patent application (PCT/IB2025/057271) for "DISCHARGE CHAMBER ACCOMMODATING MULTIPLE DISCHARGES" on Jul 17, 2025. With publication no. WO/2026/033295, the details related to the patent application was published on Feb 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GILLESPIE, Walter, Dale (17075 Thornmint CtSan Diego, 92127)

Abstract: A discharge chamber for use in a deep ultraviolet radiation source, the discharge chamber containing a first pair of electrodes that may serve to provide a seed pulse ...