International Patent: COHERENT OUTSIDE-THE-LENS IMAGING OF MOIRÉ TARGETS FOR OVERLAY METROLOGY

GENEVA, July 2 -- KLA CORPORATION filed a patent application (US2025/059077) for “COHERENT OUTSIDE-THE-LENS IMAGING OF MOIRÉ TARGETS FOR OVERLAY METROLOGY”. With publication no. WO/2026/136101, here are the other details related to the patent application:

Kind: Initial Publication with ISR [A1]

IPC: G03F 7/00

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Disclaimer: Curated by HT Syndication....