GENEVA, Dec. 15 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/064986) for "VIBRATION-ISOLATED SUPPORT" on May 30, 2025. With publication no. WO/2025/252606, the details related to the patent application was published on Dec 11, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MARZOK, Carsten (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: The present invention relates to a support arrangement for an optical imaging device for microlithography, in particular for use with light in the extreme UV range (EUV), the support arrangement compri...