GENEVA, March 2 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/073683) for "SAMPLE TILT MEASUREMENT IN DUAL-BEAM DEVICE" on Aug 19, 2025. With publication no. WO/2026/041659, the details related to the patent application was published on Feb 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MAYER, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: A method for determining sample tilt in a dual-beam metrology device having a first charged-particle beam and a second charged-particle beam arranged at an angle Alpha relative to each...