GENEVA, March 29 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/069591) for "OPTICAL SYSTEM COMPRISING MULTI-MIRROR ARRAY, AND OPERATIONAL CONTROL METHOD" on Jul 09, 2025. With publication no. WO/2026/061652, the details related to the patent application was published on Mar 26, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BECKER, Moritz (Rudolf-Eber-Str. 273447 Oberkochen)
Abstract: The invention relates to an optical system, in particular an illumination system for an EUV apparatus, comprising at least one multi-mirror array (MMA) hav...