GENEVA, March 17 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/074030) for "OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM" on Aug 22, 2025. With publication no. WO/2026/052417, the details related to the patent application was published on Mar 12, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHWEIGERT, Eduard (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to an optical system (100, 200) for a projection exposure system (1), comprising an optical element (104) and a tension mount (116, 204) which supports th...