GENEVA, Feb. 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/072519) for "OPTICAL ASSEMBLY COMPRISING A MONITORING APPARATUS FOR MONITORING AN EUV COLLECTOR OF A PROJECTION EXPOSURE SYSTEM" on Aug 05, 2025. With publication no. WO/2026/037679, the details related to the patent application was published on Feb 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MERKEL, Wolfgang (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: The invention relates to a monitoring apparatus (46) of an optical assembly which is used to monitor an EUV co...