GENEVA, Sept. 16 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/053649) for "MIRROR, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM" on Feb 12, 2025. With publication no. WO/2025/185947, the details related to the patent application was published on Sep 11, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHUSCHKE, Christian (Rudolf-Eber-Strasse 273447 Oberkochen), NIEMANN, Ulrike (Rudolf-Eber-Strasse 273447 Oberkochen), WEBER, Joern (Rudolf-Eber-Strasse 273447 Oberkochen), STIRNER, Ramona (Rudolf-Eber-Strasse 273447 Ob...