GENEVA, Jan. 26 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/069611) for "METHOD OF OPERATING A DUAL BEAM DEVICE AND CORRESPONDING APPARATUS" on Jul 09, 2025. With publication no. WO/2026/017513, the details related to the patent application was published on Jan 22, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KORB, Thomas (Rudolf-Eber-Strasse 273447 Oberkochen)
Abstract: A method of operating a charged particle beam device is provided. For adjusting a sample with respect to an intersection point of two beams of the dual beam devic...