GENEVA, Feb. 23 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/072641) for "METHOD FOR PRODUCING A MICROMIRROR ELEMENT, AND MICROELECTROMECHANICAL SYSTEM" on Aug 06, 2025. With publication no. WO/2026/037704, the details related to the patent application was published on Feb 19, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): STROBEL, Sebastian (Rudolf-Eber-StraBe 273447 Oberkochen), BROCH, Katharina (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: The invention relates to a method for producing at least one micromirror element (200), as...