INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR EXAMINING A SUBSTRATE BODY FOR A COMPONENT IN A LITHOGRAPHY APPARATUS, SUBSTRATE BODY AND LITHOGRAPHY APPARATUS"

GENEVA, March 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/077004) for "METHOD FOR EXAMINING A SUBSTRATE BODY FOR A COMPONENT IN A LITHOGRAPHY APPARATUS, SUBSTRATE BODY AND LITHOGRAPHY APPARATUS" on Sep 22, 2025. With publication no. WO/2026/062260, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BALLE, Lukas (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: Method for examining a substrate body (108) for a component (102) in a lithography apparatus (1), includi...