INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD FOR DETERMINING THE TIGHTNESS OF AN OPTICAL MODULE OF AN OPTICAL ASSEMBLY, OPTICAL ASSEMBLY AND PROJECTION EXPOSURE SYSTEM HAVING AN OPTICAL ASSEMBLY"

GENEVA, March 30 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/073571) for "METHOD FOR DETERMINING THE TIGHTNESS OF AN OPTICAL MODULE OF AN OPTICAL ASSEMBLY, OPTICAL ASSEMBLY, AND PROJECTION EXPOSURE SYSTEM HAVING AN OPTICAL ASSEMBLY" on Aug 18, 2025. With publication no. WO/2026/061710, the details related to the patent application was published on Mar 26, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BOCK, Maximilian (Rudolf-Eber-Strasse 273447 Oberkochen), HOLDERER, Hubert (Rudolf-Eber-Strasse 273447 Oberkochen), KUEGEL, Jens (Rudo...