INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD AND MOUNTING DEVICE FOR MOUNTING AN OPTICAL ELEMENT FOR MICROLITHOGRAPHY USING A MOUNTING ELEMENT AND OPTICAL MODULE FOR MICROLITHOGRAPHY"

Posted On: 2026-02-16

GENEVA, Feb. 16 -- CARL ZEISS SMT GMBH (Rudolf-Eber-StraBe 273447 Oberkochen) filed a patent application (PCT/EP2025/070829) for "METHOD AND MOUNTING DEVICE FOR MOUNTING AN OPTICAL ELEMENT FOR MICROLITHOGRAPHY USING A MOUNTING ELEMENT, AND OPTICAL MODULE FOR MICROLITHOGRAPHY" on Jul 21, 2025. With publication no. WO/2026/032669, the details related to the patent application was published on Feb 12, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TREFZ, Hans-Joachim (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: The invention relates to a method for mounting an optical element (14), prefe...

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INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD AND MOUNTING DEVICE FOR MOUNTING AN OPTICAL ELEMENT FOR MICROLITHOGRAPHY USING A MOUNTING ELEMENT AND OPTICAL MODULE FOR MICROLITHOGRAPHY"