INTERNATIONAL PATENT: CARL ZEISS SMT GMBH FILES APPLICATION FOR "METHOD AND DEVICE FOR PRODUCING AN ELEMENT, ELEMENT, IN PARTICULAR OPTICAL ELEMENT AND LITHOGRAPHY SYSTEM"

GENEVA, June 4 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2024/082958) for "METHOD AND DEVICE FOR PRODUCING AN ELEMENT, ELEMENT, IN PARTICULAR OPTICAL ELEMENT, AND LITHOGRAPHY SYSTEM" on Nov 20, 2024. With publication no. WO/2025/108984, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HOFMAIER, Andreas (Rudolf-Eber-Strasse 273447 Oberkochen), MUELLER, Tanja (Rudolf-Eber-Strasse 273447 Oberkochen), ZEMANN, Daniel (Rudolf-Eber-Strasse 273447 Oberkochen)

Abstract: The ...