GENEVA, May 4 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/078714) for "MEASURING ARRANGEMENT FOR DETERMINING POSITION AND PROJECTION EXPOSURE APPARATUS" on Oct 07, 2025. With publication no. WO/2026/087216, the details related to the patent application was published on Apr 30, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): GOEK, Jonas (Hermann-von-Helmholtz-Platz 676344 Eggenstein- Leopoldshafen), MANGER, Matthias (Rudolf-Eber-Strasse 273447 Oberkochen), MUENZ, Holger (Carl-Zeiss-Strasse 2273447 Oberkochen)
Abstract: An optical meas...